Mitard, JeromeJeromeMitardWitters, LiesbethLiesbethWittersArimura, HiroakiHiroakiArimuraSasaki, YuichiroYuichiroSasakiMilenin, AlexeyAlexeyMileninLoo, RogerRogerLooHikavyy, AndriyAndriyHikavyyEneman, GeertGeertEnemanLagrain, PieterPieterLagrainMertens, HansHansMertensSioncke, SonjaSonjaSionckeVrancken, ChristaChristaVranckenBender, HugoHugoBenderBarla, KathyKathyBarlaHoriguchi, NaotoNaotoHoriguchiMocuta, AndaAndaMocutaCollaert, NadineNadineCollaertThean, AaronAaronThean2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24265First demonstration of 15nm-WFIN inversion-mode relaxed germanium bulk nFinFET with Si-cap free RMG and NiSiGe source/drainProceedings paper