De Gendt, StefanStefanDe GendtKnotter, D. M.D. M.KnotterKenis, KarineKarineKenisDepas, MichelMichelDepasMeuris, MarcMarcMeurisMertens, PaulPaulMertensHeyns, MarcMarcHeyns2021-09-302021-09-301998https://imec-publications.be/handle/20.500.12860/2488Impact of organic contamination on thin gate oxide qualityJournal article