Chowrira Poovanna, BhavishyaBhavishyaChowrira PoovannaBlanco, VictorVictorBlancoDusa, MirceaMirceaDusaTan, Ling EeLing EeTanVats, H.H.VatsGillijns, WernerWernerGillijnsDecoster, StefanStefanDecosterNiroomand, ArdavanArdavanNiroomandRutigliani, VitoVitoRutiglianiHalder, SandipSandipHalderSangghaleh, MahtabMahtabSangghalehTyagi, DhruvDhruvTyagiKamali, AliAliKamaliNewman, MarcusMarcusNewmanDemand, M.M.DemandWako, Y.Y.WakoNegreira, A.A.NegreiraClark, R.R.ClarkNafus, K.K.NafusO'Toole, M.M.O'TooleHsia, J.J.Hsia2025-07-312025-07-312025978-1-5106-8634-20277-786XWOS:001517286200037https://imec-publications.be/handle/20.500.12860/45989Moore's Law meets High-NA EUV: Random via patterning for next-generation nodesProceedings paper10.1117/12.3050453978-1-5106-8635-9WOS:001517286200037