Chowrira, B.B.ChowriraCarballo, V. M. BlancoV. M. BlancoCarballoDusa, M.M.DusaTan, L. E.L. E.TanVats, H.H.VatsGillijns, W.W.GillijnsDecoster, S.S.DecosterNiroomand, A.A.NiroomandRutigliani, V. D.V. D.RutiglianiHalder, S.S.HalderSangghaleh, M.M.SangghalehTyagi, D.D.TyagiKamali, A.A.KamaliNewman, M.M.NewmanDemand, M.M.DemandWako, Y.Y.WakoNegreira, A.A.NegreiraClark, R.R.ClarkNafus, K.K.NafusO'Toole, M.M.O'TooleHsia, J.J.Hsia2025-07-312025-07-312025978-1-5106-8634-20277-786XWOS:001517286200037https://imec-publications.be/handle/20.500.12860/45989Moore's Law meets High-NA EUV: Random via patterning for next-generation nodesProceedings paper10.1117/12.3050453978-1-5106-8635-9WOS:001517286200037