Wilson, ChrisChrisWilsonCroes, KristofKristofCroesTokei, ZsoltZsoltTokeiVereecke, BartBartVereeckeBeyer, GeraldGeraldBeyerO'Neill, A.G.A.G.O'NeillHorsfall, A.B.A.B.Horsfall2021-10-182021-10-1820091882-0778https://imec-publications.be/handle/20.500.12860/16544Application of a nano-mechanical sensor to monitor stress in copper damascene interconnectsJournal article