Fabrication and Electromechanical Characterization of Silicon Nanomechanical Membrane Flexure MEMS Sensor for Gas Sensing Applications

Tina, B.S.B.S.TinaRohith, S.S.RohithSeena, V.V.Seena2024-08-112024-08-112024-MAR 11530-437XWOS:001280067400001https://imec-publications.be/handle/20.500.12860/44300Fabrication and Electromechanical Characterization of Silicon Nanomechanical Membrane Flexure MEMS Sensor for Gas Sensing ApplicationsJournal article10.1109/JSEN.2024.3351198WOS:001280067400001VAPOR DETECTIONHYDROGEN