van der Veen, MarleenMarleenvan der VeenHeylen, NancyNancyHeylenLariviere, StephaneStephaneLariviereVega Gonzalez, VictorVictorVega GonzalezKesters, ElsElsKestersLe, Quoc ToanQuoc ToanLeTeugels, LieveLieveTeugelsChew, Soon AikSoon AikChewPhilipsen, HaroldHaroldPhilipsenHung, JoeyJoeyHungAdelmann, ChristophChristophAdelmannVanstreels, KrisKrisVanstreelsJourdan, NicolasNicolasJourdanHolsteyns, FrankFrankHolsteynsStruyf, HerbertHerbertStruyfWilson, ChrisChrisWilsonTokei, ZsoltZsoltTokei2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/34208Co and Ru dual damascene compatible metallization studiesProceedings paperhttp://www.iitc-conference.org/technical-program-abstracts.html#