The integration of EBIE into a SIMS tool: towards quantitative depth profiles with high resolution and a better understanding of the etch mechanisms

Vanhove, NicoNicoVanhoveLievens, PeterPeterLievensVandervorst, WilfriedWilfriedVandervorst2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14723The integration of EBIE into a SIMS tool: towards quantitative depth profiles with high resolution and a better understanding of the etch mechanismsMeeting abstract