Defectivity study of Cu metallization process by dark- and bright-field inspection

Carbonell, LaureLaureCarbonellHolsteyns, FrankFrankHolsteynsTokei, ZsoltZsoltTokeiO'Reilly, L.L.O'ReillyMaex, KarenKarenMaexMertens, PaulPaulMertens2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7275Defectivity study of Cu metallization process by dark- and bright-field inspectionProceedings paper