Peter, AntonyAntonyPeterMartens, KoenKoenMartensRampelberg, GeertGeertRampelbergToeller, MichaelMichaelToellerAblett, JamesJamesAblettMeersschaut, JohanJohanMeersschautCuypers, DanielDanielCuypersFranquet, AlexisAlexisFranquetDetavernier, ChristopheChristopheDetavernierReuff, Jean-PascalJean-PascalReuffSchaekers, MarcMarcSchaekersVan Elshocht, SvenSvenVan ElshochtJurczak, GosiaGosiaJurczakAdelmann, ChristophChristophAdelmannRadu, IulianaIulianaRadu2021-10-222021-10-2220151616-301Xhttps://imec-publications.be/handle/20.500.12860/25752Metal-insulator transition in ALD VO2 ultrathin films and nanoparticles: morphological controlJournal articlehttp://onlinelibrary.wiley.com/doi/10.1002/adfm.201402687/abstract