Effect of Al2O3 and SiO2 Abrasives on the CMP of molybdenum using different polishing parameters

Kalantzis, PanagiotisPanagiotisKalantzisTeugels, LieveLieveTeugelsDe Gendt, StefanStefanDe Gendt2021-10-242021-10-242017-10https://imec-publications.be/handle/20.500.12860/28624Effect of Al2O3 and SiO2 Abrasives on the CMP of molybdenum using different polishing parametersProceedings paper