Compositional characterization of nickel silicides by HAADF-STEM imaging

Verleysen, EvelineEvelineVerleysenBender, HugoHugoBenderRichard, OlivierOlivierRichardSchryvers, NickNickSchryversVandervorst, WilfriedWilfriedVandervorst2021-10-192021-10-1920110022-2461https://imec-publications.be/handle/20.500.12860/20068Compositional characterization of nickel silicides by HAADF-STEM imagingJournal article10.1007/s10853-010-5191-z