Internal photoemission of electrons from Ta-based conductors into SiO2 and HfO2 insulators

Shamuilia, S.S.ShamuiliaAfanasiev, ValeriValeriAfanasievStesmans, AndreAndreStesmansSchram, TomTomSchramPantisano, LuigiLuigiPantisano2021-10-172021-10-1720080021-8979https://imec-publications.be/handle/20.500.12860/14462Internal photoemission of electrons from Ta-based conductors into SiO2 and HfO2 insulatorsJournal article