Transfer of a high temperature LPCVD-SiN photonic layer on wafers with thermal budget limitations

Pham, NgaNgaPhamO'Callaghan, JohnJohnO'CallaghanThanjavur Prakasam, VittalVittalThanjavur PrakasamNeutens, PieterPieterNeutensCeuppens, JorisJorisCeuppensVisker, JakobJakobViskerZhou, DiDiZhouHelin, PhilippePhilippeHelin2025-06-172024-12-042025-06-1720242160-5033WOS:001327768000029https://imec-publications.be/handle/20.500.12860/44915Transfer of a high temperature LPCVD-SiN photonic layer on wafers with thermal budget limitationsProceedings paper10.1109/OMN61224.2024.10685248979-8-3503-8492-5WOS:001327768000029