Lofrano, MelinaMelinaLofranoVermeersch, BjornBjornVermeerschOprins, HermanHermanOprinsPark, SeonghoSeonghoParkTokei, ZsoltZsoltTokei2024-02-292024-02-292022978-1-6654-8503-6N/Ahttps://imec-publications.be/handle/20.500.12860/43602Impact of FEOL cross heating on the thermal performance of advanced BEOLProceedings paper