Control of texture and oxygen stoichiometry in reactively sputtered RuO2 electrode layers for low fatigue PZT FECAPs

Norga, GerdGerdNorgaWouters, DirkDirkWoutersConard, ThierryThierryConardMaes, HermanHermanMaes2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/2061Control of texture and oxygen stoichiometry in reactively sputtered RuO2 electrode layers for low fatigue PZT FECAPsOral presentation