Oniki, YusukeYusukeOnikiRagnarsson, Lars-AkeLars-AkeRagnarssonCott, DaireDaireCottDekkers, HaroldHaroldDekkersDentoni Litta, EugenioEugenioDentoni LittaAltamirano Sanchez, EfrainEfrainAltamirano SanchezHolsteyns, FrankFrankHolsteynsHoriguchi, NaotoNaotoHoriguchi2021-10-292021-10-292020https://imec-publications.be/handle/20.500.12860/35673Nanosheet RMG: metal gate and interface dipole patterningMeeting abstracthttps://www.linx-consulting.com/wp-content/uploads/2020/08/LINX_SPCC2020_Agenda_R12.pdf