Satta, AlessandraAlessandraSattaLindsay, RichardRichardLindsaySeveri, SimoneSimoneSeveriHenson, KirklenKirklenHensonMaex, KarenKarenMaexMcCoy, S.S.McCoyGelpey, J.J.GelpeyElliott, K.K.Elliott2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9552Device characteristics of ultra-shallow junctions formed by fRTP annealingProceedings paper