Nanometer-scale roughness analysis of Si surfaces by TM-AFM for low-temperature epitaxy

Chollet, FredericFredericCholletCaymax, MattyMattyCaymaxVandervorst, WilfriedWilfriedVandervorstAndré, E.E.André2021-09-292021-09-291995https://imec-publications.be/handle/20.500.12860/554Nanometer-scale roughness analysis of Si surfaces by TM-AFM for low-temperature epitaxyProceedings paper