Heyns, MarcMarcHeynsBellenger, FlorenceFlorenceBellengerBrammertz, GuyGuyBrammertzCantoro, MircoMircoCantoroCaymax, MattyMattyCaymaxDe Gendt, StefanStefanDe GendtDe Jaeger, BriceBriceDe JaegerDelabie, AnneliesAnneliesDelabieEneman, GeertGeertEnemanGroeseneken, GuidoGuidoGroesenekenHoussa, MichelMichelHoussaIacopi, FrancescaFrancescaIacopiLeonelli, DanieleDanieleLeonelliLin, DennisDennisLinMagnus, WimWimMagnusMartens, KoenKoenMartensMerckling, ClementClementMercklingMeuris, MarcMarcMeurisMitard, JeromeJeromeMitardPenaud, JulienJulienPenaudPourtois, GeoffreyGeoffreyPourtoisScarrozza, MarcoMarcoScarrozzaSimoen, EddyEddySimoenSioncke, SonjaSonjaSionckeSoree, BartBartSoreeVan Elshocht, SvenSvenVan ElshochtVandenberghe, WilliamWilliamVandenbergheVandooren, AnneAnneVandoorenVerhulst, AnneAnneVerhulstWang, Wei-EWei-EWang2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15473Scaling of nanoelectronics beyond the Si roadmapMeeting abstract