Mertens, PaulPaulMertensRotondaro, AntonioAntonioRotondaroMeuris, MarcMarcMeurisSchmidt, HaraldHaraldSchmidtHeyns, MarcMarcHeynsGräf, D.D.Gräf2021-09-292021-09-291994https://imec-publications.be/handle/20.500.12860/248Effect of oxidation ramp up on the redistribution of metallic contamination in gate oxidesProceedings paper