Investigation of PECVD dielectrics for nondispersive metal- insulator-metal capacitors

Van Huylenbroeck, StefaanStefaanVan HuylenbroeckDecoutere, StefaanStefaanDecoutereVenegas, RafaelRafaelVenegasJenei, SnezanaSnezanaJeneiWinderickx, GillisGillisWinderickx2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6943Investigation of PECVD dielectrics for nondispersive metal- insulator-metal capacitorsJournal article