Na, Myung HeeMyung HeeNaJang, DoyoungDoyoungJangBaert, RogierRogierBaertSarkar, SatadruSatadruSarkarPatli, SudhirSudhirPatliZografos, OdysseasOdysseasZografosChehab, BilalBilalChehabSpessot, AlessioAlessioSpessotSisto, GiulianoGiulianoSistoSchuddinck, PieterPieterSchuddinckMertens, HansHansMertensOniki, YusukeYusukeOnikiHellings, GeertGeertHellingsDentoni Litta, EugenioEugenioDentoni LittaRyckaert, JulienJulienRyckaertHoriguchi, NaotoNaotoHoriguchi2021-12-072021-11-022021-12-072021naWOS:000675595800161https://imec-publications.be/handle/20.500.12860/37667Disruptive Technology Elements, and Rapid and Accurate Block-Level Performance Evaluation for 3nm and BeyondProceedings paper10.1109/EDTM50988.2021.9420975978-1-7281-8176-9WOS:000675595800161