Chery, EmmanuelEmmanuelCherySlabbekoorn, JohnJohnSlabbekoornPinho, NelsonNelsonPinhoMiller, AndyAndyMillerBeyne, EricEricBeyne2022-03-162022-03-1620210569-5503WOS:000702282700053https://imec-publications.be/handle/20.500.12860/39461Advances in Photosensitive Polymer Based Damascene RDL Processes: Toward Submicrometer Pitches With More Metal LayersProceedings paper10.1109/ECTC32696.2021.00064978-0-7381-4523-5WOS:000702282700053