Downscaling area-selective deposition to sub-30 nm half-pitch lines

Pasquali, MattiaMattiaPasqualiMurdoch, GayleGayleMurdochTokei, ZsoltZsoltTokeiDe Gendt, StefanStefanDe GendtArmini, SilviaSilviaArmini2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33753Downscaling area-selective deposition to sub-30 nm half-pitch linesMeeting abstracthttps://iitc-conference.org/2019-iitc-mam-program/