60nm half pitch contact layer printing: exploring the limits at 1.35NA lithography

Bekaert, JoostJoostBekaertHendrickx, EricEricHendrickxVandenberghe, GeertGeertVandenberghe2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/1336260nm half pitch contact layer printing: exploring the limits at 1.35NA lithographyProceedings paper