Melkonyan, DavitDavitMelkonyanFleischmann, ClaudiaClaudiaFleischmannArnoldi, LaurentLaurentArnoldiDemeulemeester, JelleJelleDemeulemeesterKumar, ArulArulKumarBogdanowicz, JanuszJanuszBogdanowiczVurpillot, FrancoisFrancoisVurpillotVandervorst, WilfriedWilfriedVandervorst2021-10-242021-10-2420170304-3991https://imec-publications.be/handle/20.500.12860/28957Atom probe tomography analysis of SiGe fins embedded in SiO2: facts and artefactsJournal articlehttp://www.sciencedirect.com/science/article/pii/S0304399117300293