300 mm wafer-level, ultra-dense arrays of Au-capped nanopillars with sub-10 nm gaps as reliable SERS substrates

Li, JiaqiJiaqiLiChen, ChangChangChenJans, HildeHildeJansXu, XiuMeiXiuMeiXuVerellen, NielsNielsVerellenVos, IngridIngridVosOkumura, YasuakiYasuakiOkumuraMoshchalkov, VictorVictorMoshchalkovLagae, LiesbetLiesbetLagaeVan Dorpe, PolPolVan Dorpe2021-10-222021-10-2220142040-3364https://imec-publications.be/handle/20.500.12860/24125300 mm wafer-level, ultra-dense arrays of Au-capped nanopillars with sub-10 nm gaps as reliable SERS substratesJournal articlehttp://pubs.rsc.org/en/content/articlelanding/2014/nr/c4nr04315d#!divAbstract