Revised split C-V technique for mobility investigation in advanced devices

Kilchytska, ValeriaValeriaKilchytskaLederer, DimitriDimitriLedererSimon, P.P.SimonCollaert, NadineNadineCollaertRaskin, Jean-PierreJean-PierreRaskinFlandre, DenisDenisFlandre2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10694Revised split C-V technique for mobility investigation in advanced devicesProceedings paper