EUV scattering from CNT pellicles: measurement and control

Pollentier, IvanIvanPollentierLuettgenau, BernhardBernhardLuettgenauBrose, SaschaSaschaBroseTimmermans, MarinaMarinaTimmermansHuyghebaert, CedricCedricHuyghebaertBrems, StevenStevenBremsGallagher, EmilyEmilyGallagher2022-03-112022-03-112021978-1-5106-4051-10277-786XWOS:000672825700023https://imec-publications.be/handle/20.500.12860/39411EUV scattering from CNT pellicles: measurement and controlProceedings paper10.1117/12.2584718978-1-5106-4052-8WOS:000672825700023