Controllable change of porosity of 3-methylsilane low-k dielectric film

Shamiryan, DenisDenisShamiryanBaklanov, MikhaïlMikhaïlBaklanovVanhaelemeersch, SergeSergeVanhaelemeerschMaex, KarenKarenMaex2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5651Controllable change of porosity of 3-methylsilane low-k dielectric filmJournal article