Lauvernier, D.D.LauvernierVan Thourhout, DriesDriesVan ThourhoutDetavernier, C.C.DetavernierBaets, RoelRoelBaets2021-10-162021-10-162007-12https://imec-publications.be/handle/20.500.12860/12446Metal bonding with ultra-thin layer for optical applicationsProceedings paper