Schram, TomTomSchramRagnarsson, Lars-AkeLars-AkeRagnarssonLujan, GuilhermeGuilhermeLujanDeweerd, WimWimDeweerdChen, JerryJerryChenTsai, WilmanWilmanTsaiHenson, KirklenKirklenHensonLander, RobRobLanderHooker, JacobJacobHookerVertommen, JohanJohanVertommenDe Meyer, KristinKristinDe MeyerDe Gendt, StefanStefanDe GendtHeyns, MarcMarcHeyns2021-10-162021-10-162005-03https://imec-publications.be/handle/20.500.12860/11180Performance improvement of self-aligned HfO2/TaN and SiON/TaN nMOS transistorsJournal article