Athermal arrayed waveguide gratings in silicon-on-insulator by overlaying a polymer cladding on narrowed waveguides

Wang, LinghuaLinghuaWangBogaerts, WimWimBogaertsDumon, PieterPieterDumonSelvaraja, ShankarShankarSelvarajaTeng, JieJieTengPathak, ShibnathShibnathPathakHan, X.X.HanWang, J.J.WangJian, X.X.JianZhao, MingshanMingshanZhaoBaets, RoelRoelBaetsMorthier, GeertGeertMorthier2021-10-202021-10-202012-030003-6935https://imec-publications.be/handle/20.500.12860/21834Athermal arrayed waveguide gratings in silicon-on-insulator by overlaying a polymer cladding on narrowed waveguidesJournal article