Long-term miniaturized flexible hermetic encapsulation for implantable medical devices using polymers and atomic layer deposited ceramics

Li, ChangzhengChangzhengLi2021-10-282021-10-282020-06https://imec-publications.be/handle/20.500.12860/35460Long-term miniaturized flexible hermetic encapsulation for implantable medical devices using polymers and atomic layer deposited ceramicsPHD thesis