Calibrated Modeling of Line-to-Line Dielectric Reliability: LER Specs to Meet Reliability Constraints at Operating Conditions

Ciofi, IvanIvanCiofiRoussel, PhilippePhilippeRousselSaad, YvesYvesSaadMelvin, LawrenceLawrenceMelvinWilson, ChrisChrisWilsonCroes, KristofKristofCroes2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/32715Calibrated Modeling of Line-to-Line Dielectric Reliability: LER Specs to Meet Reliability Constraints at Operating ConditionsMeeting abstracthttps://www.lithoworkshop.org/assets/2019/2019-Litho-Workshop-Program-Book-v1.2.pdf