Advanced CMOS manufacturing, a drive for plasma science and technology

de Marneffe, Jean-FrancoisJean-Francoisde MarneffeAltamirano Sanchez, EfrainEfrainAltamirano SanchezMilenin, AlexeyAlexeyMileninSamara, VladimirVladimirSamaraBoullart, WernerWernerBoullartBaklanov, MikhaïlMikhaïlBaklanov2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20548Advanced CMOS manufacturing, a drive for plasma science and technologyProceedings paper