Schulze, AndreasAndreasSchulzeEyben, PierrePierreEybenHantschel, ThomasThomasHantschelVandervorst, WilfriedWilfriedVandervorst2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/29399Scanning Spreading Resistance Microscopy (SSRM): High resolution 2D and 3D carrier mapping of semiconductor nanostructuresBook chapterhttps://www.crcpress.com/Metrology-and-Diagnostic-Techniques-for-Nanoelectronics/Ma-Seiler/p/book/9789814745086