Catalytic forming gas anneal on III-V/Ge MOS sytems

Wang, Wei-EWei-EWangLin, Han-ChungHan-ChungLinBrammertz, GuyGuyBrammertzDelabie, AnneliesAnneliesDelabieSimoen, EddyEddySimoenCaymax, MattyMattyCaymaxMeuris, MarcMarcMeurisHeyns, MarcMarcHeyns2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16527Catalytic forming gas anneal on III-V/Ge MOS sytemsProceedings paper