Gonzalez, PilarPilarGonzalezSeveri, SimoneSimoneSeveriLenci, SilviaSilviaLenciMerken, PatrickPatrickMerkenWitvrouw, AnnAnnWitvrouwDe Meyer, KristinKristinDe Meyer2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13786Evaluation of piezoresistivity and 1/f noise of polycrystalline SiGe for MEMS sensor applicationsProceedings paper