De Wolf, IngridIngridDe WolfHoward, DaveDaveHowardRasras, MahmoudMahmoudRasrasLauwers, A.A.LauwersMaex, KarenKarenMaexGroeseneken, GuidoGuidoGroesenekenMaes, HermanHermanMaes2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/1829A reliability study of titanium silicide lines using micro-raman spectroscopy and electron microscopyJournal article