Analytical model of the DC-actuation of electrostatic MEMS devices with distributed dielectric charging and non-planar electrodes

Rottenberg, XavierXavierRottenbergDe Wolf, IngridIngridDe WolfNauwelaers, BartBartNauwelaersDe Raedt, WalterWalterDe RaedtTilmans, HarrieHarrieTilmans2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12811Analytical model of the DC-actuation of electrostatic MEMS devices with distributed dielectric charging and non-planar electrodesJournal article