Gronheid, RoelRoelGronheidFonseca, CarlosCarlosFonsecaLeeson, MichaelMichaelLeesonAdams, JacobJacobAdamsStrahan, JeffJeffStrahanWillson, C. GrantC. GrantWillsonSmith, Bruce W.Bruce W.Smith2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15401EUV resist requirements: absorbance and acid yieldProceedings paper