Van Look, LieveLieveVan LookBekaert, JoostJoostBekaertLaenens, BartBartLaenensVandenberghe, GeertGeertVandenbergheRichter, JanJanRichterBubke, KarstenKarstenBubkePeters, Jan HendrikJan HendrikPetersSchreel, KoenKoenSchreelDusa, MirceaMirceaDusa2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/18193Experimental study of effect of pellicle on optical proximity fingerprint for 1.35 NA immersion ArF lithographyProceedings paper