Beaucarne, GuyGuyBeaucarneCaymax, MattyMattyCaymaxPeytier, IvanIvanPeytierPoortmans, JefJefPoortmans2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5048Polysilicon thin-film solar cells: influence of the deposition rate upon enhanced diffusion and on cell performanceProceedings paper