Hsu, MarkMarkHsuPantouvaki, MariannaMariannaPantouvakiMerckling, ClementClementMercklingMarinelli, AntonioAntonioMarinelliVan Campenhout, JorisJorisVan CampenhoutAbsil, PhilippePhilippeAbsilVan Thourhout, DriesDriesVan Thourhout2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26743Design of thin film stacks for non-destructive electro-optical characterizations by spectroscopic ellipsometryProceedings paper