Crystallization study of thin ZrO2 ALD films on Al203 and on TiN for DRAM MIMCAP applications

Pawlak, MalgorzataMalgorzataPawlakMenou, NicolasNicolasMenouWang, Xin PengXin PengWangDilliway, G.G.DilliwayPierreux, D.D.PierreuxFischer, P.P.FischerVos, RitaRitaVosHoyer, R.R.HoyerKittl, JorgeJorgeKittlWouters, DirkDirkWoutersBiesemans, SergeSergeBiesemans2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14298Crystallization study of thin ZrO2 ALD films on Al203 and on TiN for DRAM MIMCAP applicationsOral presentation