Electron trap generation at different temperatures in the gate oxide

Zhang, W.D.W.D.ZhangZhang, J.F.J.F.ZhangWood, M.M.WoodLalor, M.M.LalorBurton, D.D.BurtonGroeseneken, GuidoGuidoGroesenekenDegraeve, RobinRobinDegraeve2021-10-152021-10-152002https://imec-publications.be/handle/20.500.12860/7097Electron trap generation at different temperatures in the gate oxideOral presentation