De Wolf, IngridIngridDe WolfHoward, DaveDaveHowardMaex, KarenKarenMaexMaes, HermanHermanMaes2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1173Mechanical stress in and surrounding CoSi2 and TiSi2 linesProceedings paper