Litovchenko, V. G.V. G.LitovchenkoEfremov, A. A.A. A.EfremovRomanyuk, B. N.B. N.RomanyukMel'nik, V. P.V. P.Mel'nikClaeys, CorCorClaeys2021-10-012021-10-011998https://imec-publications.be/handle/20.500.12860/2735Processes in ultrthin buried oxide synthesis stimulated by low dose ion implantationJournal article