Characterization and optimization of polycrystalline Si70%Ge30% for surface micromachined thermopiles in human body applications

Wang, ZiyangZiyangWangFiorini, PaoloPaoloFioriniLeonov, VladimirVladimirLeonovVan Hoof, ChrisChrisVan Hoof2021-10-182021-10-1820090960-1317https://imec-publications.be/handle/20.500.12860/16529Characterization and optimization of polycrystalline Si70%Ge30% for surface micromachined thermopiles in human body applicationsJournal article